XPS Testing
X-ray Photoelectron Spectroscopy [ XPS ]
- Elemental composition of the surface (top 1–10 nm usually)
- Empirical formula of pure materials
- Elements that contaminate a surface
- Chemical or electronic state of each element in the surface
- Uniformity of elemental composition across the top surface (or line profiling
- or mapping)
- Uniformity of elemental composition as a function of ion beam etching (or
- depth profiling)